You can do this fairly easily with the cross-platform free software ExifTool. It's even in in the FAQ:

The -csv (comma separated values) option solves this dilemma by pre-extracting information from all input files, then producing a sorted list of available tag names as the first row of the output, and organizing the information into columns for each tag. As well, a first column labelled "SourceFile" is generated. These features make it practical to use the -csv option for extracting all information from multiple images. For example, this command:

   exiftool -csv -r t/images > out.csv

gives an output like this:

   SourceFile,AEBBracketValue,AELock,AFAreaHeight,AFAreaMode,AFAreas,[...]
   t/images/Canon.jpg,0,,151,,,[...] t/images/Casio.jpg,,,,,,[...]
   t/images/Nikon.jpg,,,,Single Area,,[...]
   t/images/OlympusE1.jpg,,Off,,,"Center (121,121)-(133,133)",[...]

This will include a very long list, so if you want to just include a few specific things you can do that:

exiftool -csv -Model -CreateDate  -GPS:all -time:all *.jpg

(in this example, all of the files in the current directory).

The documentation warns that the -csv flag, unlike most exiftool options, builds the entire output in memory and so memory usage can be quite large when used on many files — probably best to script up something that goes folder-by-folder. (Easily done in even a simple batch language.)